Hi, I am considering using ICP-10110 pressure sensor in a project, where we will be applying a Parylene conformal coating. Obviously we will mask the air holes so they don't get coated. However, the Parylene coating is applied using chemical vapor deposition (CVD), which means the parts will be placed in a vacuum chamber during the coating process. Will this part be damaged by exposure to vacuum?
I'm guessing it is OK since the "operation range, maximum" is 25kPa, which is pretty close to vacuum...
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