MPU 6000 SPI

Hi,
I would like to start a MPU 6000 SPI device, but I cannot start it.
I do write the standard commands like,
write (0x6B, 0) // wake up device
wait 100ms
write (0x6A, 0x10) // disabled i2c
wait 1ms
read (0x75|0x80), -> 0 // read who_am_i

The charge pump seems not to start, so I expect the whole device not to start (voltage level < 1V).

A connected SPI analyzer (Beagle) shows the expected values from the SPI master, but no expected response from MPU6000.

The SDO line from MPU6000 is high after powering device and always goes low, after the very first 6 bits had been clocked on the SPI line (wakeup up command). No reaction at all afterwards.
SPI clock is pretty slow (90kHz) for testing purposes.
Any idea?
- CPout -> 2.2nf -> Gnd
- Fsync -> Gnd
- clkin -> Gnd
-regout -> 0.1u -> Gnd
Voltage levels on SPI look normal, no noise, edges are ok
Regards,
Axel